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DPA26TZ06-DV004Department of Defense — DARPA

DARPA DPA26TZ06-DV004 — Scalable Hard-mask materials with Improved Etch resistance and Low Degradation for Extreme-aspect-Ratio fabrication (SHIELDER)

Deadline
· 41d
Award ceiling
Not stated
Awards
Not stated
Posted
Sep 23, 2026

Official announcement on dod_dsip · opens the funder's page. Always confirm dates there.

Summary

Develop and demonstrate novel nanofabrication hard-mask materials that exhibit substantially improved plasma etch resistance, enabling the implementation of extreme high-aspect-ratio structures with excellent pattern-transfer fidelity, minimal sidewall roughness, and precise dimensional control. […]

Other topics in this solicitation2

Opportunity numbers beginning DPA26TZ06-, open now, soonest deadline first.

DARPA DPA26TZ06-DV005 — Fuel-Flexible Spacecraft Electric Propulsion System

DPA26TZ06-DV005Department of Defense — DARPA3 review criteria on file

—
· 41d

DARPA DPA26TZ06-DV006 — Localization, Characterization, and Modeling of Freestream Disturbances in Hypersonic Wind Tunnels

DPA26TZ06-DV006Department of Defense — DARPA3 review criteria on file

—
· 41d

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Subjects

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Source record: https://www.dodsbirsttr.mil/topics-app/?topicId=35b26ba542ed4eff81d02c2d37c48aec_86676Via dod_dsip. Always confirm dates with the funder.